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发明名称
摘要
申请公布号
JPS5423196(B2)
申请公布日期
1979.08.11
申请号
JP19730101108
申请日期
1973.09.10
申请人
发明人
分类号
H01J65/04;G01N21/01;G01N21/31;H01J61/00
主分类号
H01J65/04
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代理人
主权项
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