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经营范围
发明名称
METHOD OF FABRICATING ELECTRONIC INDUSTRIAL WAFER
摘要
申请公布号
JPS54101660(A)
申请公布日期
1979.08.10
申请号
JP19780008087
申请日期
1978.01.27
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
TAKASU SHINICHIROU;NAKASHIMA KOUICHIROU
分类号
H01L21/304;H01L21/302
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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