发明名称 SEMICONDUCTOR INTEGTATED CIRCUIT UNIT AND ITS MANUFACTURE
摘要 PURPOSE:To form the bipolar element such as lateral type transistors for the polysilicon layer, by using the selective diffusion method in CMOS as it is. CONSTITUTION:MOSFET of different channel is respectively formed at the substrate region and the well region by forming the well 4 on the silicon semiconductor substrate 1, the polysilicon layer 6 is formed via the insulation film 5 on the substrate, and the hybrid type IC having the lateral type pn junction semiconductor element is formed on the layer 6 by utilizing the diffuion process to form MOSFET on this layer 6.
申请公布号 JPS54101290(A) 申请公布日期 1979.08.09
申请号 JP19780007242 申请日期 1978.01.27
申请人 HITACHI LTD 发明人 NARITA KAZUTAKA
分类号 H01L21/8238;H01L21/8249;H01L27/06;H01L27/092 主分类号 H01L21/8238
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