发明名称 MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To avoid the side etching caused to the metal wiring crossing with the step, in the manufacture of semiconductor device. CONSTITUTION:The occurrence of side etching at the step part can be avoided by providing the dummy pattern 6a in which the width of the photo resist 6 in the step parts A and B is greater than that of the photo resist at other flat parts.
申请公布号 JPS54101274(A) 申请公布日期 1979.08.09
申请号 JP19780007208 申请日期 1978.01.27
申请人 HITACHI LTD 发明人 TAKAHASHI SHIGERU;TSUKUDA KIYOSHI
分类号 H01L21/30;G03F1/00;G03F1/68;G03F1/70;H01L21/027;H01L21/302 主分类号 H01L21/30
代理机构 代理人
主权项
地址