PROCESS AND APPARATUS FOR REACTIVE ION ETCHING,申请号EP19780101659-传众专利搜索

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发明名称	PROCESS AND APPARATUS FOR REACTIVE ION ETCHING
摘要
申请公布号	EP0002726(A3)	申请公布日期	1979.08.08
申请号	EP19780101659	申请日期	1978.12.13
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	KELLER, JOHN HOWARD;MC KENNA, CHARLES MICHAEL
分类号	H01J27/14;H01J37/08;H01J37/305;H01L21/302;(IPC1-7):H01J37/30	主分类号	H01J27/14
代理机构		代理人
主权项
地址

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