| 摘要 |
PURPOSE:To secure the uniform discharge at the entire region of the discharge space as well as to enhance the efficiency for the laser excitation by coating thinly the metal plane electrode at the silent discharge electrode part with the dielectric or the like. CONSTITUTION:Hard glass film 12 of average thickness 0.1mm is baked on earth- side metal electrode 1. In this case, hole 12-1, 12-2 and 12-3 of about 1mm diameter which are imperfect for coating exist. At these areas, the discharge is rather concentrated toward electrode 1, but these areas are small enough to the full discharge region. Thus, the excessive concentration of discharge is avoided at electrode 1 of film 12, and accordingly the lowering of the light amplification factor can be prevented at discharge space 4. |
