发明名称 DETECTING METHOD FOR PRECOAT AGENT PRESENCE FOR SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To detect the presence or absence of the precoat agent via the induced voltage by irradiating a kind of the electromagnetic wave to the precoat. CONSTITUTION:Gold wire 4 welded to element 1 mounted on heat sink 3, and the precoat agent 2 is coated. The infrared beam is selected for electromagnetic wave 5 to irradiate Si element 1, and the wavelength of the electromagnetic wave is selected to such value as to be absorbed into agent 2. In case the precoat is imperfect, the electromotive force is induced within the substrate by the electromagnetic wave. Thus, the presence or absence of the precoat can be detected (6) in a simple way.
申请公布号 JPS54100259(A) 申请公布日期 1979.08.07
申请号 JP19780006957 申请日期 1978.01.24
申请人 NIPPON ELECTRIC CO 发明人 NAKAGAWA KEIICHI
分类号 H01L21/66;H01L21/56 主分类号 H01L21/66
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