Illuminating device for photo-lacquer layer on substrate - provides collimating arrangement for light source projecting congruent partial beams onto layer via photomask

摘要

The illumination device is for a photo-lacquer layer formed on a substrate. A light collimating arrangement is placed in the light beam radiated by a light source (1). A photo-mask (3) is positioned on the outlet side of the collimating arrangement. The latter separates the collected beam into partial ray shafts which are congruently projected over each other. The collimating arrangement can be formed from quartz rods (6) placed together without joins. The cross-sectional surfaces of the rods can have a form corresponding to that of the substrate (5) surface (4) to be illuminated.