发明名称 PYROLYTIC BORON NITRIDE COATED BOAT FOR METAL VAPORIZATION
摘要 Resistance-heated vaporization boats for the vacuum vaporization of metals, such as aluminum, chromium, copper or the like, are made by machining a boat cavity in at least one side of a graphite bar. The bar is totally encapsulated over its entire outer surface, including the boat cavity, with a continuous coating of pyrolytic boron nitride (PBN). The PBN coating is removed from areas at both ends of the bar to provide electrical contact zones for connecting the bar to a power source. The sides and ends of the boat cavity have smooth contours without sharp corners and the ends of the cavity have a hemispherical configuration to resist longitudinal expansion of the PBN coating thereby preventing separation of the PBN coating from the surface of the graphite bar. The PBN coating is deposited from a gas at a temperature of 1750 DEG C. to 2300 DEG C. and has a thickness of at least 0.010 inch.
申请公布号 GB2012251(A) 申请公布日期 1979.07.25
申请号 GB19790000728 申请日期 1979.01.09
申请人 UNION CARBIDE CORP 发明人
分类号 C23C14/26;C04B41/50;C04B41/87;C23C14/24;(IPC1-7):01B21/06 主分类号 C23C14/26
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