摘要 |
Apparatus for the preparation of a semiconductor compound having one component with a substantially higher vapor pressure than the other using a closed horizontal ampule in a pressure vessel with the two ends of the ampule located in respective heating ovens in which the ampule is self supporting without a support tube in the zone between the heating ovens thereby permitting this zone, which is highly heated by means of an inductive heating apparatus or the like, to be cooled directly by means of a cooling gas circulating in the pressure vessel and in which the coupling of the heating means to a graphite boat or the like inside the ampule is improved.
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