发明名称 Method for forming floating gate semiconductor device by selective ion-implantation
摘要 A semiconductor device for use as a non-volatile semiconductor memory is provided with a floating gate formed by ion implantation.
申请公布号 US4162176(A) 申请公布日期 1979.07.24
申请号 US19760715767 申请日期 1976.08.19
申请人 SUWA SEIKOSHA K K 发明人 TSUDA, AKIHITO
分类号 H01L21/8247;H01L21/28;H01L29/49;H01L29/788;H01L29/792;(IPC1-7):H01L21/26;B01J17/00;H01L21/32 主分类号 H01L21/8247
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