PLASMA ETCHING METHOD,申请号JP19770158412-传众专利搜索

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发明名称	PLASMA ETCHING METHOD
摘要
申请公布号	JPS5493360(A)	申请公布日期	1979.07.24
申请号	JP19770158412	申请日期	1977.12.30
申请人	FUJITSU LTD	发明人	NAKAMURA MORITAKA
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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