| 摘要 |
PURPOSE:To attain relative positioning efficiently by providing circular patterns different in diameter for positioning to a mask. CONSTITUTION:In addition to the 1st layer pattern 31, the 2nd to 5th layer mask patterns 32 to 35 are used which are concentric and different in diameter. As a result, a shift in position can be found through entire sense and recognized quickly by an operator, and reduction in pattern area against variations of diameters (r1) to (r5) becomes smallest; and pattern precision is high, and a ratio of the pattern effective area is also high. |
