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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS5487195(A)
申请公布日期
1979.07.11
申请号
JP19770154456
申请日期
1977.12.23
申请人
HITACHI LTD
发明人
MATSUMOTO TETSUO
分类号
H01L21/822;H01L21/8234;H01L27/02;H01L27/04;H01L27/088;H01L29/78
主分类号
H01L21/822
代理机构
代理人
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