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经营范围
发明名称
POLYCRYSTAL SILICON PROCESSING METHOD
摘要
申请公布号
JPS5487186(A)
申请公布日期
1979.07.11
申请号
JP19770154484
申请日期
1977.12.23
申请人
HITACHI LTD
发明人
KIYOTA SHIYOUGO
分类号
H01L23/52;H01L21/316;H01L21/3205;H01L21/322
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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