| 摘要 |
<p>PURPOSE:To perform the processing almost agreed with the set value, by performing dressing after fixing blade with minimized eccentricity in the static type zero point set method, and by setting the amount of cutting with rotary type zero point set method. CONSTITUTION:The spindle head 9 is lowered with the static type zero point set unit 15, and when the blade 12 is in contact with the stage 3, the lowering is stopped with illumination 15. By taking the read of the dial gauge 19 at this position as the reference, and the blade is again upward. After the revolution of spindle for a given amount, the contact between the blade and the stage is detected, and the displacement of stage to the reference value is read. With this method, the eccentricity of the blade is minimized. When the switch 17 is selected and the rotary type zero point set unit 16 is operated, the head 9 is moved down while turning the blade and the zero setting of the stage 3 is made, and the amount of cutting is set by moving up the spindle head by the remained cut amount of the substrate 4. Since the detection is all electrically made, no distortion of thin blade is caused, measurement value can be obtained with high accuracy, and desired machining can be made.</p> |
