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发明名称	WASHING
摘要
申请公布号	JPS5486968(A)	申请公布日期	1979.07.10
申请号	JP19770154458	申请日期	1977.12.23
申请人	HITACHI LTD	发明人	TSUNEMATSU MASAYASU;MEGURO HIDEO
分类号	B08B6/00;B08B5/00;H01L21/302;H01L21/31	主分类号	B08B6/00
代理机构		代理人
主权项
地址

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