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发明名称
STRAHLUNGSEMPFINDLICHE POSITIV ARBEITENDE MATERIALIEN
摘要
申请公布号
DE2757932(A1)
申请公布日期
1979.07.05
申请号
DE19772757932
申请日期
1977.12.24
申请人
LICENTIA PATENT-VERWALTUNGS-GMBH
发明人
HERSENER,JUERGEN,DR.-ING.;WILHELM,ALFRED
分类号
C08F20/00;C08F20/02;G03F7/039;H01L21/027;(IPC1-7):G03C1/68;H01L21/30;H01L21/312
主分类号
C08F20/00
代理机构
代理人
主权项
地址
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