发明名称 MICROANALYSIS METHOD THAT USE XXRAYS RADIATION
摘要 A process and device for micro-analysis in which a thin layer of anticathode material is scanned by means of a pencil-beam of electrons. The X-rays formed are received by a thin layer of converter where they give rise to a current of photoelectrons which is subject to an intensity measurement by an analyser. From the measurement of intensity of the photoelectrons are deduced the properties of the zone of the anticathode which receives the pencil-beam.
申请公布号 JPS5483893(A) 申请公布日期 1979.07.04
申请号 JP19780146134 申请日期 1978.11.28
申请人 ANVAR 发明人 JIYAAKU KAZO
分类号 G01N23/227;H01J37/252 主分类号 G01N23/227
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