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发明名称
Aufdampfsteuerverfahren
摘要
申请公布号
DE1295310(B)
申请公布日期
1969.05.14
申请号
DE1964F041923
申请日期
1964.02.05
申请人
FUJITSU LTD.
发明人
YAMAGISHI;KAZUO DIPL.-ING.;NAKAMURA;TADASHI DIPL.-ING.
分类号
C23C14/30;C23C14/54;H01J37/304;H01J37/305
主分类号
C23C14/30
代理机构
代理人
主权项
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