| 摘要 |
PURPOSE:To improve the defects of not only entailing laboriousness in process but also being inferior in dimensional accuracy at the forming of thick film couplers by forming the thick film couplers right above the light guides having beforehand been formed, through optical exposure. CONSTITUTION:A mask film 31 composed of Au vapor deposition film is formed on the surface of a molten quartz substrate 11 and the He<+>32 radiated from above is injected only in the light guide region 33. As a result, a buried type light guide 34 in which the arrow 50 is the propagating direction of guide light is formed. Next, a photo polymerizable film 35 mainly composed of an acrylic resin having been coated on a base film 36 is thermocompression bonded to the substrate surface. A photo mask 37 having a dark part 38 is so contacted on the substrate back as to shield part of the guide 34. Parallel light 39 from an Ar laser is radiated. A thick film pattern 40 of an acrylic resin is formed by developing processing, and the unnecessary mask 31 is removed. The angle of inclination of the end face 41 of the thick film coupler depends upon the angle of inclination of the light 39. |
