| 摘要 |
<p>PURPOSE:To improve the accuracy of inspection and yield without dropping through-put correspondingly to the sort of a semiconductor element by arranging plural ID information on the proper position of a pallet, arranging a positional information checking signal in the vicinity of the ID information and reading out the ID information or positional information on the pallet concerned. CONSTITUTION:An inspection stage 7 for mounting a pallet 2 storing many semiconductor elements 3 can be driven in the X, Y, Z, and theta directions by driving a motor. A probe card 8 is arranged on a position opposite to the stage 7 and the electric characteristics of the element 3 in the pallet 2 on the stage 7 is inspected by a probe stylus 9 of the probe card 8. A storage board 11 can be vertically moved in accordance with the movement of a supporting shaft 13 connected to the motor 7. In the case of executing an inspection, the pallet 2 is carried from the cassette to the stage 7 by a carrying mechanism and vacuum suction is executed on the stage 7. Then the information of an ID information setting mechanism 5 and a position checking hole 6 formed on a non-section part of the pallet 2 is detected by a proper detecting means shown in Fig.5 to position the pallet 2.</p> |
