| 摘要 |
<p>PURPOSE:To prevent dusts from adhering onto a mask board and to simplify a loading mechanism by using means for opening or closing a mask substrate cassette when the cassette is loaded in a chamber for sealing from the atmosphere also as means for feeding it to a desired position in a chamber. CONSTITUTION:The door MCHD of a mask chamber MCH is opened, and a cassette of the state that a cassette body MCH is coupled to a cassette cover MCC to seal its interior is placed on a table. Then, the door MCHD is closed, the chamber MCC is evacuated in vacuum, He gas is filled therein, the table is raised by an elevator EA, and a mask substrate MF is moved to a desired position. Thus, the functions of a separating mechanism for separating the body MCM from the cover MCC and a selecting mechanism for the substrate MF are provided in a body chamber WMC, and a predetermined exposure is conducted in the chamber WMC. When it is finished, the door MCHD is opened by a reverse operation thereto to be opened with the atmosphere.</p> |
