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发明名称
VORRICHTUNG ZUR DARSTELLUNG VON HALBLEITERSTRUKTUREN NACH DEM FLUESSIGPHASENEPITAXIEVERFAHREN
摘要
申请公布号
DD136198(A1)
申请公布日期
1979.06.20
申请号
DD19780205081
申请日期
1978.04.28
申请人
GOTTSCHALCH,VOLKER,DD;BUTTER,EHRENFRIED,DD;JACOBS,KLAUS,DD;KRAMER,PETER,DD
发明人
GOTTSCHALCH,VOLKER,DD;BUTTER,EHRENFRIED,DD;JACOBS,KLAUS,DD;KRAMER,PETER,DD
分类号
H01L21/208;(IPC1-7):H01L21/208
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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