发明名称 |
Dissolution of metals utilizing a H{HD 2{L O{HD 2{L -sulfuric acid solution catalyzed with selenium compounds |
摘要 |
Clean etchings at high rates are obtained using a solution containing sulfuric acid, hydrogen peroxide, a catalytic amount of a selenium compound of a +4 oxidation state and a secondary or tertiary alcohol.
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申请公布号 |
US4158593(A) |
申请公布日期 |
1979.06.19 |
申请号 |
US19770849576 |
申请日期 |
1977.11.08 |
申请人 |
DART INDUSTRIES INC. |
发明人 |
ALLAN, JOHN L. H.;READIO, PHILIP D. |
分类号 |
C23F1/16;H05K3/06;(IPC1-7):C09K13/06;C23F1/00 |
主分类号 |
C23F1/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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