发明名称 |
ELECTRON BEAM RESIST |
摘要 |
The invention relates to a negative electron resist for application in electron lithography. It consists of an organic copolymer formed by copolymerization of butadiene or isoprene with glycidyl acrylate or glycidyl methacrylate. The resist exhibits the high sensitivity to irradiation by electrons and, at the same time, a good adhesion to the base and a resistance towards common etching agents. The copolymer is advantageously prepared by radical polymerization and a high purity of the product does not require further purification. The electron resist manufactured in this way has the long-term workability. |
申请公布号 |
JPS5476135(A) |
申请公布日期 |
1979.06.18 |
申请号 |
JP19780135923 |
申请日期 |
1978.11.06 |
申请人 |
CESKOSLOVENSKA AKADEMIE VED |
发明人 |
YAROSURAFU KARARU;BOFUMIRU BENDARU;YAROMIRU ZAHOBUARU;JIRI PEETORU;ZUDENEKU PERUTSUBAUERU;FURANTEISEEKU SUBUETSUKU |
分类号 |
C08F20/00;C08F20/32;C08F236/00;C08F236/04;G03F7/038;H01L21/027 |
主分类号 |
C08F20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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