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发明名称
QUALITY DECISION SYSTEM FOR SEMICONDUCTOR CHIP
摘要
申请公布号
JPS5474379(A)
申请公布日期
1979.06.14
申请号
JP19770141101
申请日期
1977.11.26
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
ARIMURA YOSHIAKI;TSUMURA KAZUHIRO;HITOMI YUTAKA
分类号
H01L21/68;H01L21/66
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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