发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A process for producing a semiconductor arrangement includes forming an insulation layer on a sillicon substrate, forming contact holes in the insulation layer, forming an alloy layer contg. sillicon which is in contact with the silicon substrate, and heat treatment. The alloy layer contains a dopant and enough sillicon so that a doped silicon filling layer can form in the contact hole.
申请公布号 KR900001660(B1) 申请公布日期 1990.03.17
申请号 KR19860005915 申请日期 1986.07.21
申请人 MITSUBISHI ELECTRIC CORP 发明人 ARAI HAJIME;HARADA HIROSHI
分类号 H01L21/60;H01L21/28;H01L21/285;H01L21/768;H01L23/532;H01L29/43;(IPC1-7):H01L21/88 主分类号 H01L21/60
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