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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPS5473575(A)
申请公布日期
1979.06.12
申请号
JP19770141359
申请日期
1977.11.24
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KONDOU SHIYUUJI
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
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