Anordnung zur Erzeugung und Fuehrung eines ElektroAnordnung zur Erzeugung und Fuehrung eines Elektronenstrahles nenstrahles

摘要

1,196,787. Electron beam furnaces. AIR REDUCTION CO. Inc. 23 Nov., 1967 [16 Dec., 1966; 3 May, 1967; 22 May, 1967; 11 Aug., 1967], No. 53318/67. Heading HD. An electron beam furnace utilizes a beam which is initially ribbon-shaped and is deflected in a magnetic field transverse to the plane of the ribbon to follow an arcuate path in the plane of the ribbon. The extent of the magnetic field is limited so that electrons at the outer edge of the beam are in the field longer than those at the inner edge and the beam is focused to a minimum cross-section. In Fig. 1 the gun 26 and the crucible 33 are on opposite sides of a wall 32 between an upper chamber 20 at a pressure of less than 10-2 torr and a lower chamber 22 at a pressure of less than 10-4 torr. The beam 25 is deflected by magnet 28 through a narrow opening 23 in the wall 32 and then by further perpendicular magnets 51, 52 on to a desired spot at the crucible 33. Metal or carbon plates define the opening 23 and are burnt through in the event of excessive divergence or inaccurate deflection of the beam. The electron gun 26 comprises one, or two, elongated emitters 27 disposed in recesses in a beam forming electrode and parallel elongated accelerating electrodes 46. A plurality of guns may be used for directing beams through a plurality of openings 23 arranged about the crucible 33. In Fig. 4 a single magnet 53 is employed and the furnace is not separated into two chambers. The magnet comprises separate pairs 60, 61, 62 of polepiece segments and the beam 25b is deflected and converged as shown. In Figs. 6 and 7 the magnet 63 comprises a pair of semicircular polepieces 65, 66 slanted towards and away from each other as shown to provide an inhomogenous field for producing a more convergent beam 25c. The polepieces may be connected to solenoids or permanent magnets. In Fig. 9 two separate pairs of polepieces 75, 77 are utilized for greater versatility . In the gun of Fig. 13 comprising an elongated emitter 27d and an accelerating electrode plate 46d having an elongated opening, the beam has an initial non- normal orientation due to the magnetic field of the emitter current and is then deflected in a transverse magnetic field established between a pair of bar shaped polepieces interconnected by electromagnets which may be independently energized to establish a suitable field gradient. The beam is longitudinally and laterally focused in the bowed out fringe field 91. In an alternative embodiment the magnetic field is established between a pair of flared polepieces interconnected by a single electromagnet (Fig. 17).