Opto-electronic sensor acting as charge injection device - has sensor zones on chip surface, with surfaces between them contacted by electrode material

摘要

The sensor is of the opto-electronic type and is designed to operate as a charge injection device. The sensor consists of a doped semiconductor chip with sensor zones produced by adjacent sensor electrode separated from the chip by an insulating layer. A surface (11) near each sensor zone (3) and between the sensor zones (3), only in part along a sensor zone edge, is contacted by an electrode material layer (10).