ELECTRON SPECTROSCOPIC APPARATUS

摘要

PURPOSE:To analyze the internal structure of sample by applying a bias voltage to the sample with respect to the electron beam incident part of an energy analyzing means. CONSTITUTION:The electron beams 2 generated from an electron gun 1 are finely focused by a focusing lens 3 and are radiated onto a smple 4. The Auger electrons (e) generated from the sample by the electron radiation are introduced into a cylindrical energy analyzer 6 constituted by an outer tube 5a and inner tube 5b disposed coaxially, where they are deflected and focused for each energy by the electric field formed between the outer and inner tubes by a sweep power source 7 and are detected with a detector 8. Here, when a bias voltage is applied to the sample 4 and a bias voltage is also applied from a variable bias power source 11 to an energy analyzer 6, shifting of energy values will not occur. As a result, accurate fixing of the element may be performed.