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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5467763(A)
申请公布日期
1979.05.31
申请号
JP19770134999
申请日期
1977.11.10
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
TAKASE TAKEOMI
分类号
H01L21/322;H01L21/263
主分类号
H01L21/322
代理机构
代理人
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