| 摘要 |
PURPOSE:To perform accurate measurement of electrical characteristics of respective elements in a wafer state by providing ground electrodes to the back of the piezoelectric body in the wafer state of the piezoelectric body. CONSTITUTION:In the case of measuring the electrical characteristics of respective elements where the elastic surface wave elements are in a wafer state, electrical contact is maintained by means of metal made springs 4 to the respective terminals of the input and output electrodes 2, 3 of the interdigital electrodes on a piezoelectric body 1 and an input signal is applied and respective outputs are obtained from the output electrodes 3, whereby measurement of frequency characteristics, central frequencies, etc. is performed. |
