| 摘要 |
The diaphragm (12) of the shut-off valve can be moved by an opening mechanism (20-26). The outer side (28) of the diaphragm (12) can be subjected to a vacuum. The opening mechanism (20-26) is a piston (20) which can be subjected to the vacuum in the vacuum line (10). The arrangement is such that it is first of all the outer side (28) of the diaphragm (12) and only then the piston (20) which is subjected to the vacuum. The subjection of the outer side (28) of the diaphragm (12) to the vacuum is brought about by relieving the diaphragm (12), allowing it to be moved rapidly even by a weak opening mechanism (20-26). It is advantageous to relieve the diaphragm (12) before the opening mechanism (20-26) is actuated. <IMAGE> |
