发明名称 PHOTOSENSITIVE COPYING COMPOSITION
摘要 This invention relates to a photosensitive copying composition comprising a solvent and a naphthoquinone-(1,2)-diazidesulfonic acid ester as the photosensitive compound, said naphthoquinone diazide sulfonic acid ester having the general formula I <IMAGE> wherein: X is a single bond or one of the groups CO, CH2, S, SO2, or <IMAGE> R1, R1' and R1'' are the same or different and are H or D, R2 and R2' are the same or different and are H or halogen, R3 is halogen or D, and D is a naphthoquinone-(1,2)-diazidesulfonyloxy group.
申请公布号 JPS5463818(A) 申请公布日期 1979.05.23
申请号 JP19780117364 申请日期 1978.09.22
申请人 HOECHST AG 发明人 PAURU SHIYUTAARUHOOFUEN;FURITSUTSU ERUTOMAN
分类号 C08K5/00;C08K5/22;C08L61/00;C08L61/04;C09B53/00;G03C1/72;G03F7/022;H01L21/027;H05K3/00 主分类号 C08K5/00
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