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发明名称
VERFAHREN ZUM GESTEUERTEN OBERFLAECHENTEXTURIEREN VON KRISTALLINEM HALBLEITERMATERIAL
摘要
申请公布号
DE2817072(A1)
申请公布日期
1979.05.23
申请号
DE19782817072
申请日期
1978.04.19
申请人
SRI INTERNATIONAL
发明人
JOSEPH MAGEE,THOMAS;ROBERT PETTIJOHN,RICHARD;ANN STEWART,SHELLEY;THACKRAY,MALCOLM
分类号
H01L31/04;H01L21/263;H01L21/306;H01L31/0236;(IPC1-7):H01L21/306;H01L21/26
主分类号
H01L31/04
代理机构
代理人
主权项
地址
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