| 摘要 |
<p>PURPOSE:To make a thermal head difficult to be oxidized and to stabilize the resistance by using a niobium boride as a thin film exothermic resistor. CONSTITUTION:A substrate 1 such as ceramic glass, which is prepared by the heat treatment at 200 to 500 deg.C, is formed with a thin film exothermic resistor 2 of niobium boride in the atmosphere of Ar of 1X10<-3> to 5X10<-1> (preferably, 1X10<-2> to 1X10<-1>) Torrs by the sputtering method using a target which is prepared by sintering niobium boride in advance at a temperature higher than 1100 deg.C through the vacuum hot press, followed by the heat treatment at 200 to 650 deg.C. An electric conductor 3 for supplying electricity to the resistor 2 is further formed, and a protecting layer 4 such as SiO2 is then formed by the vacuum evaporation and sputtering method using electron beams.</p> |
