发明名称 Chemical ablation of single crystal alkaline earth metal halide
摘要 Ablation of single crystal alkaline earth metal halides as barium fluoride is accomplished by contacting them with monovalent acid in fluid medium. Smooth etched surfaces are obtained by hydrogen halide as hydrochloric acid in aqueous solution acting on single crystal barium fluoride.
申请公布号 US4155803(A) 申请公布日期 1979.05.22
申请号 US19770859890 申请日期 1977.12.12
申请人 FORD AEROSPACE & COMMUNICATION;FORD MOTOR 发明人 HURLEY, MICHAEL D;ZAPELLA, PIERINO I
分类号 H01L21/306;(IPC1-7):H01L21/30 主分类号 H01L21/306
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