发明名称 Mask photorepeater apparatus
摘要 A mask photorepeater apparatus for the production of small size masks has an objective-holder whose lens has a magnification very much less than 1 and an object-holder able to move in a plane. For each printing operation, under the action of servomechanisms, the objective-holder rises or drops to bring its object plane within the plane of the object to be printed.
申请公布号 US4155642(A) 申请公布日期 1979.05.22
申请号 US19770851802 申请日期 1977.11.15
申请人 THOMSON-CSF S A 发明人 LACOMBAT, MICHEL
分类号 G03B27/32;G02B27/18;G03F7/20;G03F7/207;G03F9/02;H01L21/027;H01L21/30;(IPC1-7):G03B27/42 主分类号 G03B27/32
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