发明名称 Self crossed field type ion source
摘要 An ion source of the electron bombardment type which includes mainly a cathode and an anode confronting the cathode. In order to effect the formation of a magnetic field perpendicular to an electric field established between the cathode and the anode, the anode and/or the cathode is of a particular configuration, more specifically a spiral or helical configuration. A flow of large current is supplied through the anode to establish the magnetic field while application of a given voltage across the cathode produces a multiplicity of electrons. With such an arrangement, movements of charged particles such as electrons or ions are controlled under the influences of the electric and magnetic fields thereby to enhance the production of ions. High temperature operations and simplified implementations become possible because the present ion source itself produces the magnetic field with only a modification of the electrode assembly thereof.
申请公布号 US4156159(A) 申请公布日期 1979.05.22
申请号 US19750587967 申请日期 1975.06.18
申请人 FUTABA DENSHI KOGYO K.K. 发明人 TAKAGI, TOSHINORI
分类号 H01J27/02;H01J27/22;(IPC1-7):H01J1/50 主分类号 H01J27/02
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