| 摘要 |
PURPOSE:To prevent the movement of disposed material, by placing a tool removable on the suceptor and by providing holes having slightly greater shape than the disposed material. CONSTITUTION:In the concave 17 on the suceptor 13, the tool 18 in matching with the wafer to be disposed is put, and after that, wafers are put in the hole 19 of the tool 18 and the wafers are placed on the suceptor 13, performing the wafer disposal. Accordingly, the movement of wafer can be avoided, uiform disposal can be made, and one plasma disposal unit can make for various sized wafers. |
