| 摘要 |
An electrostatic beam deflection system is provided for use in electron beam devices. In the present system several grids and an accelerating electrode are geometrically configured to direct positive ions away from an electron emitter surface. These positive ions are typically formed by interaction of the electrons emitted from the emitter surface with a gas ambient or with species adsorbed on the various grids and electrodes. Degradation of the electron emitter surface is thereby reduced, and the lifetime of the emitter concomitantly extended.
|
