| 摘要 |
PURPOSE:By using the radiation mark of razor beam on the surface or its back side of base plate, proper number or mark is engraved without affecting the damage to the cristal surface. CONSTITUTION:In a semi conductor wafer 5, by the mark of a razor beam 6 a marked number 7 is formed which does not introduce new deficiency such as micro crack and so on. The energy which energy possesses converts to heat energy on the semi conductor wafer and it heats radiation portion for temperature rise and the portion is melted and vaporized to leave the radiation mark clearly. |
