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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPS5458362(A)
申请公布日期
1979.05.11
申请号
JP19770124532
申请日期
1977.10.19
申请人
HITACHI LTD;NIPPON TELEGRAPH & TELEPHONE
发明人
IIDA SHINYA;KOMATSU HIDEO;MIZUTANI TATSUMI;HIGUCHI HISAYUKI;ASAKAWA MAKOTO;MATSUO SEITAROU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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