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发明名称
ELECTRICAL TESTING UNIT OF SEMICONDUCTOR DEVICE AND ITS PRODUCTION
摘要
申请公布号
JPS5457968(A)
申请公布日期
1979.05.10
申请号
JP19770125454
申请日期
1977.10.18
申请人
NIPPON ELECTRIC CO
发明人
HINO MASAO;OSABE HIROSHI
分类号
H01L21/66;G01R31/26;H01L23/48
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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