ELECTROOMECHANICAL TRANSDUCER

摘要

PURPOSE:To obtain a transducer of a small coefficient of temperature by using the glass composed primarily of SiO2 and containing specific amount of Al2O3 as a substrate material. CONSTITUTION:The elastic suface wave element is formed by sputtering a ZnO thin plate as a piezoelectric thin film on a glass substrate composed primarily of SiO2 and having contents of Al2O3 within a range of 3 to 20wt% and providing interdigital type input-output transducers on said thin film respectively isolatedly. Thereby, the element which is superior in temperature characteristics and is also possible to make its temperature coefficient 0 ppm within a practicably usable range of + or - 30 ppm/ deg.C may be obtained.