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发明名称
EXHAUST SYSTEM FOR ELECTRON MICROSCOPE OR THE LIKE
摘要
申请公布号
JPS5455163(A)
申请公布日期
1979.05.02
申请号
JP19770121454
申请日期
1977.10.12
申请人
HITACHI LTD
发明人
NAKAIZUMI YASUSHI;KATAGIRI SHINJIROU
分类号
H01J37/18
主分类号
H01J37/18
代理机构
代理人
主权项
地址
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