发明名称 SISTEMA PERFEZIONATO PER LA FABRICAZIONE DI RESISTORI SU WAFER DI SILICIO E SIMILI
摘要 High value resistors, of the order of 109 ohms/square and higher, are fabricated by implanting zinc or lead ions into a silicon dioxide layer over a silicon chip containing electrical components and/or circuits.
申请公布号 IT1031241(B) 申请公布日期 1979.04.30
申请号 IT19750019693 申请日期 1975.01.29
申请人 INTERNATIONAL BUSINESS MACHINES CORP 发明人
分类号 H01L21/3205;H01L21/02;H01L21/265;H01L21/3115;H01L21/768;H01L23/522;(IPC1-7):01L/ 主分类号 H01L21/3205
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