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经营范围
发明名称
ELECTRON BEAM EXPOSURE APPARATUS
摘要
申请公布号
JPS5454581(A)
申请公布日期
1979.04.28
申请号
JP19770121702
申请日期
1977.10.11
申请人
FUJITSU LTD
发明人
FURUKAWA YASUO;OKABE MASAHIRO;ITOU AKIO;ISHIZUKA TOSHIHIRO;INAGAKI YUUSHI
分类号
H01L21/027;H01L21/26
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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